Study on Polymer Materials Evaluation System for Nano-Imprint Lithography
نویسندگان
چکیده
منابع مشابه
3D Simulation of Nano-Imprint Lithography
A proof of concept study of the feasibility of fully three-dimensional (3D) time-dependent simulation of nano-imprint lithography of polymer melt, where the polymer is treated as a structured liquid, has been presented. Considering the flow physics of the polymer as a structured liquid, we have followed the line initiated by de Gennes, using a Molecular Stress Function model of the Doi and Edwa...
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ژورنال
عنوان ژورنال: Journal of Photopolymer Science and Technology
سال: 2005
ISSN: 0914-9244,1349-6336
DOI: 10.2494/photopolymer.18.543